Thin film deposition
Semiconductor etching
Surface treatment and plasma cleaning
Deposition
Etching
Surface Treatment
Silicon Deep Reactive Ion Etching (DRIE) systems for MEMS device fabrication
Reactive Ion Etching (RIE) systems for R&D and production
Xenon Difluoride (XeF2) Etching systems for MEMS fabrication
Plasma cleaning systems for surface treatment of plastic packages and lead-frames
UV ozone cleaning systems for surface treatment of various substrates
Aqua Plasma cleaning systems using water vapor
Remote plasma cleaning systems
