SpeedFam Clean System Co., Ltd.

As the cleaning machine division of Speed Fam Corporation, start of manufacturing and sales of cleaning equipment

Established as a manufacturing and sales company of cleaning equipment, Speed Fam Clean System Corporation

Start of manufacturing and sales of scrubber-equipped cleaning equipment for magnetic disks

Integration of Speed Fam Corporation's cleaning business division into Speed Fam Clean System Corporation

Start of manufacturing and sales of optical disk cleaning equipment

Start of manufacturing and sales of liquid crystal substrate glass horizontal sheet cleaning equipment

Successfully developed a warm pure water drying system for fluorine alternative drying, and began application experiments

Start of mass production of cleaning equipment equipped with warm pure water drying system

Relocated and newly constructed the Yamagata factory from Tendo City, Yamagata Prefecture, to the Kandzaishi Central Industrial Park

Established an R&D center within the Yamagata factory premises for development of cleaning processes

Start of mass production of modular flow cleaning equipment

Commercialization of horizontal cleaning equipment for PDP substrates, TFT substrates, and large-sized products

Commercialization of ultrasonic combined double-sided simultaneous scrubbing cleaning equipment (DSS-320)

Integration of NEO drying

Commercialization of large mask coating equipment

Commercialization of scrubbing cleaning equipment for small diameter (0.85 inch) disks

Expanded assembly factory within Yamagata factory premises

Increased capital to 88 million yen

Relocated headquarters to a new building in Oyama, Ayase City, Kanagawa Prefecture

Start of manufacturing spin sheet cleaning equipment