| 1964 |
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| 1964 |
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| 1964 |
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| 1964-03 |
Founder Haruro Ushio's trajectory |
| 1964-03 |
Established: March 1964 (Showa 39) |
| 1966 |
Developed the first halogen lamp in Japan. |
| 1966 |
By orienting the lamp from vertical to horizontal, light efficiency increased. Since then, the horizontal lighting method has become mainstream. |
| 1966 |
Delivered Ushio's first Solar Simulator to the University of Tokyo Space and Aeronautics Research Institute. |
| 1967 |
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| 1967 |
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| 1968 |
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| 1968 |
At a time when contact methods were mainstream, Ushio pioneered the practical use of projection methods worldwide. This is the origin of Ushio's current exposure equipment 'UX Series'. |
| 1969 |
The world's largest output at the time. |
| 1969 |
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| 1970 |
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| 1970 |
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| 1970 |
Used in the 'Tower of the Sun', the symbol of the Osaka Expo. |
| 1971 |
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| 1971 |
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| 1971 |
Certified at the CIE (International Commission on Illumination) conference. Ushio's light became a world standard. |
| 1972 |
A precursor to today's LCD displays and other light-based information display systems. |
| 1972 |
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| 1972 |
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| 1973 |
Five times longer life, twice the brightness, and half the size compared to conventional ones. Ushio's fishing lantern spread to Asian countries. |
| 1974 |
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| 1974 |
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| 1974 |
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| 1975 |
Equipped with 19 water-cooled xenon short-arc lamps, delivered to the Space Development Agency (now JAXA). Subsequently participated in the government's Sunshine Plan. |
| 1977 |
Reduced wafer baking time from several minutes to just a few dozen seconds. |
| 1980 |
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| 1981 |
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| 1981 |
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| 1982 |
Developed for epitaxial crystal film formation. Its clean, uniform, and rapid energy control unique to light received high praise. |
| 1982 |
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| 1982 |
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| 1983 |
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| 1983 |
The world's first photonic cleaning device that removes molecular-level fine organic compounds (dirt) adhered to semiconductor and crystal oscillator surfaces using low-pressure UV lamp ultraviolet radiation (dry cleaning). This technology became the basis for later precise photonic cleaning devices using excimer lamps. |
| 1984 |
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| 1984 |
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| 1984 |
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| 1984 |
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| 1984 |
A compact handheld UV curing device for UV ink and paint. Its handheld irradiation allows multi-angle 3D curing. |
| 1985 |
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| 1985 |
A resist hardening device for pre-etching, integrated into the ultra-LSI manufacturing line, Ushio's first photonic device. Powerful deep UV (DUV) prevents resist deformation and sagging, maintaining high-precision fine patterns in a short time. |
| 1986 |
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| 1986 |
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| 1986 |
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| 1986 |
A new model that enhanced the light-collecting ability of the 1972-developed product. It shortened the precise bonding of electronic and optical components to the millisecond level, contributing to improved assembly efficiency of precision equipment. |
| 1986 |
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| 1986 |
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| 1988 |
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| 1988 |
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| 1988 |
Lamp sales. |
| 1988 |
A device that engraves high-definition circuit patterns on film substrates. As the substrate becomes sheet-shaped, it enables laptops, mobile phones, LCD displays, and others to be smaller, thinner, lighter, and even foldable. |
| 1988 |
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| 1988 |
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| 1988 |
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| 1988 |
A heater light source that coats special ceramics on the surface of halogen lamps, emitting a peak of 3 to 5 μm far-infrared rays. It is deployed in heating, drying, cooking, food processing, and healthcare fields. |
| 1988 |
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| 1989 |
Sale of lamps. |
| 1989 |
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| 1989 |
Removes unnecessary resist on the wafer periphery with high precision and sharpness using ultraviolet light. Significantly contributes to improving semiconductor productivity and process cleanliness. |
| 1989 |
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| 1990 |
Sale of fishing gear. |
| 1990 |
Manufacture and sale of lamps. |
| 1990 |
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| 1990 |
Lighting effects for stores aiming to enhance brightness, increasingly common in department stores and large shopping centers. |
| 1990 |
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| 1991 |
Manufacture and sale of industrial electronic equipment. |
| 1991 |
Enables four times larger circuit engraving on ICs of the same size by using narrow-band peak at 365 nanometers (i-line). |
| 1991 |
Removes unnecessary resist around wafers along chip shapes, enabling waste-free utilization of wafers. |
| 1992 |
Manufacture and sale of projection equipment. |
| 1992 |
Sale of lamps. |
| 1993 |
First in the world to commercialize. Initially for optical cleaning in the LCD industry. |
| 1993 |
Developed for micro-machining. Achieved for the first time a 200 mm square irradiation area (conventional 70 mm square) and a focus depth of 100 microns (conventional several tens of microns) using ultra-high-pressure UV lamps and projection exposure technology. |
| 1993 |
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| 1993 |
Uses super-line cut mirrors with network patterns, achieving 1.5 times the light collection efficiency, about 20% energy saving, and compactness. |
| 1994 |
A fine cleaning device that removes organic compound dirt, a high-tech challenge, using light. Offers over ten times faster cleaning speed and higher cleanliness compared to wet cleaning with water or chemicals, consumes one-third of power, and allows low-temperature processing. |
| 1994 |
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| 1995 |
Holding company. |
| 1995 |
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| 1996 |
Manufacture and sale of lamps. |
| 1996 |
Sale of lamps. |
| 1996 |
Developed for calibration of the SeaWiFS Ocean Color and Sea Surface Temperature Radiometers (OCTS) and high-performance visible near-infrared radiometers (AVNIR). |
| 1996 |
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| 1996 |
8kW ultra-high-pressure UV lamp developed for liquid crystal color filter exposure. To accommodate larger substrates. Lamp also progressing towards higher output. |
| 1996 |
Inter-electrode accuracy 0.1 millimeters, 250W. Pioneer of the subsequent projector ultra-high-pressure UV lamp "NSH Lamp". |
| 1997 |
Sale of lamps. |
| 1997 |
Research and development of light sources and optical devices. |
| 1997 |
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| 1997 |
Light source for reading OA equipment. Achieves more than twice the high brightness and high stability compared to conventional small fluorescent lamps, greatly contributing to the speed-up of next-generation digital copiers. |
| 1998 |
Supports large-screen display and improved image quality of DLP (Digital Light Processing) projectors. High-brightness light source developed based on ultra-high-pressure UV lamps. |
| 1999 |
Manufacture and sale of lamps. |
| 1999 |
Upgraded the UX-5 developed in 1999 to meet the demands of the current generation. Moreover, by modularizing key functions such as lenses, alignment, light sources, and transport, it is possible to upgrade and customize only the necessary functions in the future. |
| 2000 |
Ushio Marine Co., Ltd. was merged into Ushio U-Tech Co., Ltd. |
| 2000 |
Established GigaPhoton Corporation (development, manufacturing, and sale of excimer lasers for lithography, etc.). |
| 2001 |
Reorganized Christie Group into Christie Digital Systems, Inc., Christie Digital Systems USA, Inc., and Christie Digital Systems Canada Inc. |
| 2001 |
Established Ushio U-Tech (Hong Kong) Co., Ltd. in Hong Kong (renamed Ushio Lighting (Hong Kong) Co., Ltd., liquidated in March 2010, sales of industrial machinery). |
| 2001 |
Ceramic Xenon Lamp (integrated mirror type Xenon lamp). |
| 2001 |
Flash lamp annealing, instant heating of only the surface in 1/1,000 seconds. Bonding of fine transistors to LSI substrates. |
| 2002 |
Step & Repeat Projection Exposure Equipment "UX-7". |
| 2003 |
Acquired US-based Event Audio Visual Group, Inc. (video equipment rental business). |
| 2003 |
Established Ushio Shanghai, Inc. in China (lamp sales). |
| 2003 |
TAB inspection device. Circuit pattern inspection device for flexible printed circuit boards (TAB). Captures the pattern of the illuminated board with a CCD camera and judges through image processing. |
| 2004 |
Established Ushio (Suzhou) Co., Ltd. in China (manufacture and sale of lamps). |
| 2004 |
Ushio Lighting Co., Ltd. and Ushio U-Tech Co., Ltd. merged with Ushio U-Tech Co., Ltd. as the surviving company, and renamed Ushio Lighting Co., Ltd. |
| 2004 |
Ushio Oregon, Inc. was merged into Ushio America, Inc. |
| 2004 |
Established Christie Digital Systems (Shanghai), Ltd. in China (sales of digital video equipment) |
| 2004 |
Spray coater coats resist uniformly and continuously on three-dimensional surfaces with unevenness of 200 micrometers without interruption. |
| 2004 |
UV irradiation device (ODF) for drop-type liquid crystal panel bonding. The device bonds and encapsulates liquid crystals on glass substrates by light. By switching from the conventional 'injection method' to a 'drop method,' the bonding process time is shortened from 10 hours to just a few minutes. |
| 2005 |
Established Hyogo Ushio Lighting Corporation (lamp manufacturing, liquidated in November 2012). |
| 2005 |
Acquired a 50% stake in Germany's XTREME Technologies GmbH (development, manufacturing, and sales of EUV light source devices), which was liquidated in December 2017. |
| 2005 |
Acquired Polish company Natrium S.A. (now Ushio Poland Sp. zo. o., lamp manufacturing). |
| 2005 |
Mask/Pellicle foreign object inspection device for short-time automatic inspection of foreign objects on the top surface of reticles and pellicles used in exposure equipment. |
| 2006 |
Infrared therapy device 'Cerabeam VR630' equipped with a special 'metal halide lamp' that peaks at wavelengths of 630nm and 670nm in the infrared region. |
| 2007 |
Acquired US company Vista Controls Systems, Corp. (integrated into Christie Digital Systems USA, Inc. in January 2015, manufacturing and sales of image processing systems). |
| 2008 |
Acquired Epitec Corporation (now Ushio Electric Co., Ltd., manufacturing and sales of LEDs). |
| 2008 |
Established Ushio Shenzhen, Inc. in China (lamp sales). |
| 2008 |
Acquired 100% stake in XTREME Technologies GmbH, making it a wholly owned subsidiary. |
| 2008 |
UV therapy device 'Cerabeam® UV308' irradiates affected areas with highly effective 308nm ultraviolet light using an excimer lamp, treating psoriasis, vitiligo, atopic dermatitis, etc. It is the world's first UV therapy device equipped with an excimer filter, reducing risks to healthy skin and enabling effective and safe irradiation treatment. |
| 2008 |
Multi-filament heater with temperature control, developed for semiconductor and solar cell manufacturing. It can heat necessary areas optimally by independently controlling the filament to raise the temperature of the peripheral parts that tend to cool down. |
| 2008-02 |
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| 2009 |
Acquired US company Necsel Intellectual Property, Inc. (development, manufacturing, and sales of semiconductor lasers). |
| 2009 |
Acquired US company Luminetx Corporation (Christie Medical Holdings, Inc., manufacturing and sales of medical devices, sold in June 2019). |
| 2009 |
LED-equipped spot UV irradiation device 'SPL-1'. First to incorporate LED light source in the long-standing collimated UV irradiation device 'Spot Cure' since 1972. |
| 2010 |
Established Christie Digital Systems (Shenzhen) Co., Ltd. in China (manufacturing of digital video equipment). |
| 2010 |
Acquired all shares of US company Necsel Intellectual Property, Inc. (development, manufacturing, and sales of semiconductor lasers), making it a wholly owned subsidiary. |
| 2010 |
Large-area projection exposure device 'UX-4' series equipped with projection lenses capable of processing large areas at once. Announced in 2010: 'UX4-LEDs' for high-brightness LED manufacturing and 'UX4-ECO' for power semiconductor manufacturing; in 2011: 'UX4-3Di' for 3D LSI device manufacturing and 'UX4-MEMS' for MEMS manufacturing. |
| 2011 |
Transferred all shares of GigaPhoton Corporation to Komatsu Ltd. |
| 2011 |
Equipped with only 1-2 LED chips per module, achieving brightness comparable to conventional rare gas fluorescent lamps. Power consumption is reduced by 75%. |
| 2011 |
Compatible with UV inkjet printers that apply tiny inks non-contact and directly, and cure ink quickly with ultraviolet light. Features include instant ON-OFF control to prevent power loss and productivity decline, long lifespan unique to LEDs, and environmentally friendly mercury-free design. |
| 2011 |
The world's thinnest 4.9mm UV thin-type illuminance meter. Wireless type eliminates complicated wiring, and it can accurately measure and manage UV illuminance under actual manufacturing conditions without being affected by height restrictions or irradiation distance, thereby improving quality in various UV processes. |
| 2012 |
Established Christie Digital Systems South America Ltda. in Brazil for digital video equipment sales. |
| 2012 |
Acquired additional shares of Adtech Engineering through a tender offer, making it a consolidated subsidiary. |
| 2012 |
Renamed Ushio Singapore Pte. Ltd. to Ushio Asia Pacific Pte. Ltd. |
| 2012 |
Established Ushio America Holdings, Inc. in the United States as a North American holding company. |
| 2012 |
Established Ushio (Shaoguan) Co., Ltd. in China for lamp manufacturing. |
| 2012 |
Acquired VR Solutions Pty. Ltd. in Australia and its subsidiaries VR Solutions India Pvt. Ltd. (now Christie Digital Systems Australia Pty. Ltd. and Christie Digital Systems (India) Pvt. Ltd.) for digital video equipment sales. |
| 2012 |
Renewed the UX-7 developed in 2002 for cutting-edge semiconductor device manufacturing with a 2.5D lamination structure. Supports φ200mm and φ300mm wafers, equipped with a large-diameter projection exposure lens with a large shot size of 78×66mm, significantly reducing the manufacturing cost of interposers through large-area substrates and high throughput. |
| 2012 |
A tabletop excimer light irradiator that enables excimer light experiments. Allows simple and flexible excimer light experiments such as hydrophilization and modification. |
| 2012-04 |
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| 2013 |
Established Ushio Asia Pacific (Thailand) Ltd. in Thailand for lamp sales. |
| 2013 |
Established Christie Digital Systems Mexico, S. DE R.L. DE C.V. in Mexico for digital video equipment sales. |
| 2013 |
First in Japan to realize quantitative analysis of serum ferritin using immunochromatography. Also sells dedicated reagents. |
| 2013 |
UV irradiation device for implants. |
| 2014 |
Acquired Arsenal Media Inc. in Canada (now Christie Digital Systems Canada Inc.) for digital content planning and production. |
| 2014 |
Established Ushio Opto Semiconductors Corporation (now Ushio Inc.) for manufacturing and sales of LEDs and semiconductor lasers. |
| 2014 |
Acquired additional shares of Adtech Engineering through a share exchange, making it a wholly owned subsidiary. |
| 2015 |
Acquisition of Coolux GmbH in Germany (now Christie Digital Systems Germany GmbH, manufacturing and sales of digital content control equipment) |
| 2015 |
Acquisition of Maxray Corporation (now Ushio Lighting Corporation, sales of lighting fixtures) |
| 2015 |
The company name of Epitec Corporation was changed to Ushio Epitec Corporation |
| 2015 |
Acquisition of Allure Global Solutions, Inc. in the United States (sold in November 2018, providing digital signage solutions) |
| 2015 |
Compared to conventional models, illuminance increased threefold and UV bonding process time reduced to one-third |
| 2015 |
A compact personal spectrophotometer that can measure and detect concentrations of proteins, heavy metals, endocrine disruptors, DNA, etc., in conjunction with smartphones and tablets |
| 2015-03 |
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| 2016 |
Acquisition of American Green Technology, Inc. in the United States (exclusion from consolidated subsidiaries in December 2018, sale of lamps) |
| 2016 |
Acquisition of PD-LD, Inc. in the United States (now Necsel Intellectual Property, Inc., development, manufacturing, and sales of semiconductor lasers) |
| 2016 |
Relocated headquarters to Marunouchi, Chiyoda-ku, Tokyo |
| 2016 |
Acquisition of Sansolitt Corporation (sales of medical skincare products) |
| 2016 |
Ushio Opto Semiconductors Corporation and Ushio Epitec Corporation merged, with Ushio Opto Semiconductors Corporation as the surviving company |
| 2016 |
Established Ushio Medical Technology (Suzhou) Co., Ltd. in China (research, development, production, and sales of advanced medical technology and core parts, as well as peripheral equipment) |
| 2016 |
Handheld ultraviolet sterilizer |
| 2016 |
The world's first visualization sheet beam laser that directly utilizes light from a laser diode (LD) in fluid analysis |
| 2017 |
Established Ushio Entertainment Holdings Inc. (a group company overseeing entertainment-related businesses in Japan) |
| 2017 |
Achieved high output operation and long life even in high-temperature regions by optimizing active layer structures and emission regions, and adopting packages with high heat dissipation performance |
| 2017 |
Succeeded in increasing the output of near-infrared region (Short Wavelength Infrared, hereafter SWIR) LEDs by approximately 1.5 times compared to conventional products |
| 2017-03 |
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| 2018 |
Maxray Corporation was merged into Ushio Lighting Corporation |
| 2018 |
New lineup of UV-LED drying devices |
| 2018 |
New model of the "Serabeam® UV308" series (released in 2008) |
| 2018 |
Eximer laser irradiation units for semiconductor manufacturing processes. Achieves 5 times higher brightness and 60% downsizing in volume compared to conventional products |
| 2019 |
UV-LED drying device for rotary printing presses |
| 2019 |
Wood lamp (translucent lighting fixture) "Cerabeam® Woody" |
| 2019 |
EUV light source for EUV mask inspection in mass production processes |
| 2020 |
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| 2020 |
Achieved the world's highest CW light output of 200mW |
| 2020 |
Realizes shortened curing time during electronic component bonding with irradiation across a wide wavelength range (300-1000nm) from infrared (IR) to ultraviolet (UV) |
| 2020 |
UV light source module that is the core of the antiviral and sterilization technology "Care222®" usable in manned environments. Combines Ushio's unique optical filters to cut wavelengths that adversely affect the human body |
| 2020 |
Pre-treatment for bonding and sealing processes in automobile parts and smartphone manufacturing processes. Can be installed directly on existing production lines without special auxiliary equipment, solving issues related to cleaning and bonding processes at minimal cost, and improving quality and yield |
| 2021 |
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| 2021 |
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| 2021 |
Achieves the world's highest output (19W) and simultaneous irradiation at an angle. Enables miniaturization and cost reduction of irradiation equipment |
| 2021 |
UV irradiation device equipped with the antiviral and sterilization technology "Care222®" that can be used in manned environments. Can be installed similar to conventional lighting fixtures, enabling UV irradiation of environmental surfaces and air in manned environments, which was not possible with traditional UV irradiation devices |
| 2021 |
First in Japan to deliver UV rays reaching the "deep dermis" lesions with our own 365nm LED |
| 2021 |
Significantly downsized by adopting air cooling system |
| 2022 |
Enables sterilization of multiple locations with a single unit using a moving light type |
| 2022 |
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| 2022 |
Light source module with wide illumination area, capable of irradiating a broader range with a single unit |
| 2022 |
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| 2022 |
Equipped with a wide illumination type module, enabling UV irradiation over a wider area with a single unit |
| 2022 |
Realizes sustainable "UVB-LED phototherapy" with long lifespan and low power consumption |
| 2022 |
Achieves significant cost reduction despite high power of 25W fiber output, suitable for heating and processing metals such as gold and copper in various manufacturing processes |
| 2023 |
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| 2023 |
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| 2023 |
Maintains the conventional 250mm square irradiation area and footprint, while achieving the world's highest resolution of L/S=3μm and significant improvement in overlay accuracy as a steppers for IC package substrates |
| 2023 |
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| 2024 |
Can be connected in four directions (front, back, left, right) according to customer requirements |
| 2024 |
Significantly improves accumulated light amount and miniaturizes by Ushio's proprietary device cooling technology |
| 2024 |
Adoption of unique electrode structure enables industry’s smallest class irradiation machine size |
| 2025 |
Click here for details |
| 2025 |
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