| 1963 |
Established Tokyo Electron Research Institute with a capital of 5 million yen in Akasaka, Minato-ku, Tokyo, funded by Tokyo Broadcasting System. Started delivery and sales of diffusion furnaces, leak detectors, and IC manufacturing equipment. |
| 1964 |
Acquired import sales agency rights for diffusion furnaces from US company Sumco and began sales. |
| 1965 |
Agency contract for IC testers with US company Fairchild. |
| 1966 |
Started import and sales of the first IC tester. |
| 1967 |
Established Panetron Inc. and became Japan's first import distributor of electronic components. Opened San Francisco office. |
| 1968 |
Established a joint venture with US company Sumco, called Telsumco Inc., and started domestic production of diffusion furnaces. Opened Osaka branch. |
| 1969 |
Opened Yokohama office. Established Telsumco Inc. and started OEM export sales of car stereos. |
| 1970 |
Established Mekk Engineering Inc. relocated Telsumco Inc. building to Yokohama, aiming for complete domestic production of diffusion furnaces. Agency contract with US company Covil. |
| 1971 |
Established Tels Engineering Inc. and started sales of line printers. |
| 1972 |
Established Tokyo Process Development Inc. and started import and sale of analytical and pollution control equipment. Panetron Inc. began importing and selling microprocessors as an agent for Intel. Established TEL America, Inc. |
| 1973 |
Signed agency contract with US company Computer Vision and started importing CAD/CAM systems. Established Yamanashi business office and European office. |
| 1974 |
Received recognition from Fairchild for expanding IC tester sales. |
| 1975 |
Withdrew from production and export of consumer electronics. |
| 1976 |
Telsumco developed the world's first high-pressure oxidation equipment. |
| 1977 |
Agency contract with US company KLA. Hosted and exhibited at the 1st Semicon Japan. |
| 1978 |
Changed company name from Tokyo Electron Research Institute to Tokyo Electron Ltd. Opened Japan's first IC test center. Agency contract with US company Varian Associates. |
| 1980 |
Listed on the Second Section of the Tokyo Stock Exchange. Agency contract with US company AMD. Received the |
| 1981 |
Established Ter Jengrad Co., Ltd., and localized in-circuit board testers. |
| 1982 |
Established a comprehensive research institute within the Yamanashi facility. Established Ter Baryan Co., Ltd., and localized ion implantation devices. Initiated development of clean tracks. |
| 1983 |
Established a joint venture, Tel Ram Co., Ltd., with U.S. Ram Research. Relocated Tel Samco Co., Ltd. from Yokohama to Jōyamachi, Tsukui District, Kanagawa Prefecture. Ranked 4th in Nikkei's Excellent Companies Ranking. Opened a Kyushu office in Kumamoto Prefecture. |
| 1984 |
Re-designated to the First Section of the Tokyo Stock Exchange. Ranked 4th in Nikkei's Outstanding Companies Ranking (PRISM). |
| 1985 |
Opened the Yokohama VLSI Design Center. Established a Tohoku office. Ranked 4th in Nikkei's Excellent Companies Ranking. |
| 1986 |
Completed a comprehensive research institute in the Hosaka Industrial Complex, Nirasaki City, Yamanashi Prefecture. Shipped the first vertical diffusion furnace manufactured by Tel Samco. Converted Tel Ram Co., Ltd. into a subsidiary and renamed it Tel Yamanashi Co., Ltd. Began exporting semiconductor manufacturing equipment. |
| 1987 |
Established Tel Kyushu Co., Ltd. and opened a Fuchu office. |
| 1988 |
Converted Tel Samco Co., Ltd. into a 100% subsidiary and renamed it Tel Sagami Co., Ltd. |
| 1989 |
Ranked #1 in world sales among semiconductor manufacturing equipment manufacturers. Established Baryan Tel Co., Ltd. in California, USA. |
| 1990 |
Fully entered the display manufacturing equipment market. Established Tokyo Electron FE Co., Ltd. and Tokyo Electron Device Co., Ltd. |
| 1991 |
Achieved #1 in world sales ranking for semiconductor manufacturing equipment manufacturers for three consecutive years. Established Tokyo Electron Sapporo Co., Ltd. and Saga Co., Ltd. |
| 1992 |
Established Tel Engineering Co., Ltd. |
| 1993 |
Established Tokyo Electron FE Korea Ltd. and began selling display manufacturing equipment, Coater/Developer. |
| 1994 |
Established Tokyo Electron Europe Ltd. Renamed TEL America, Inc. to Tokyo Electron America, Inc. Shipped the first monolayer CVD equipment. |
| 1995 |
Established the corporate slogan 'Customer Satisfaction'. Founded Tokyo Electron Oregon, Inc. Opened the Kyushu Otsu office. Acquired all shares of Tokyo Electron Korea Ltd. |
| 1996 |
Established Tokyo Electron Taiwan Ltd., Massachusetts, Phoenix Laboratories, and Texas. |
| 1997 |
Established Tokyo Electron Miyagi Co., Ltd. (Matsushima office). |
| 1998 |
Completed a 300mm wafer-compatible process technology center in the Hosaka area, Yamanashi. Separated the functions of the board of directors and executive body, established a remuneration committee, an ethics committee, and an ethics‑responsible director. Introduced a stock‑option system. Established Tokyo Electron Arizona, Inc., Tokyo Electron EE Co., Ltd., and Tokyo Electron Israel Ltd. |
| 1999 |
Selected as a '4th Annual Disclosure Excellent Company' by the Tokyo Stock Exchange. Changed industry classification from 'Commerce' to 'Electrical Equipment'. Disclosed individual compensation of the CEO. |
| 2000 |
Established the 'SEMI Inoue Ko Award' in recognition of contributions to environmental initiatives in the semiconductor industry. Shipped 1,000 units of the Coater/Developer 'CLEAN TRACK™ ACT™ 8'. Tokyo Electron shares were listed on the Nikkei 225. Acquired Supercritical Systems Inc. and established a Nomination Committee. |
| 2001 |
Established the corporate message 'People. Technology. Commitment.' Acquired Timbre Technologies Inc. Received the Excellence in Corporate Governance (ECG) award from ISS. |
| 2002 |
Participated in the industry‑academia joint research and development support program (Albany NanoTech Program). Established Tokyo Electron (Shanghai) Logistic Center Ltd. and Tokyo Electron Software Technologies Co., Ltd. |
| 2003 |
Received the Prime Minister's Award. Established Tokyo Electron (Shanghai) Ltd. and TEL Technology Center, America, LLC. Introduced the executive officer system. |
| 2004 |
Established the U.S. holding company Tokyo Electron U.S. Holdings, Inc. |
| 2005 |
Received the 10th Disclosure Award. Awarded the Blue Ribbon Medal for support of the Sumatra offshore earthquake and tsunami disaster. |
| 2006 |
Established 'TEL Values'. Founded Tokyo Electron Korea Solution Ltd., U.S. TEL Venture Capital, Inc., and TEL Epion Inc. Shipped 10,000 vertical heat treatment deposition equipment units. |
| 2007 |
Established 'TEL UNIVERSITY'. Shipped a cumulative total of 20,000 wafer probers. |
| 2008 |
Received the Intellectual Property Contribution Award. Established Tokyo Electron India Private Ltd. Ranked second overall in the Prism Ranking. |
| 2009 |
Entered the solar panel manufacturing equipment business (acquired Oerlikon Solar in 2012). |
| 2010 |
Established Tokyo Electron Miyagi Co., Ltd. |
| 2011 |
Established the 'Tokyo Electron Scholarship' at Peking University. Won the Grand Prize for Semiconductor of the Year 2011. Selected among the world's 100 sustainable companies. Established Tokyo Electron (Kunshan) Ltd. |
| 2012 |
Established Tokyo Electron Singapore PTE Ltd., acquired TEL NEXX, Inc., TEL FSI, Inc., and TEL Magnetic Solutions Ltd. Won the Excellence Award for Semiconductor of the Year 2012. Began development of STT-MRAM technology. |
| 2013 |
50th anniversary. Joined the UN Global Compact. Signed a management integration agreement with Applied Materials, Inc. (U.S.). |
| 2014 |
Sold part of Tokyo Electron Devices. Exited the solar panel business. The CELLESTA™ -i MD leaf cleaning device won the Grand Prize for Semiconductor of the Year 2014. Shipped 250 units of the Triase+™ EX-II™ TiN leaf deposition equipment. |
| 2015 |
Formulated a mid-term management plan aimed at global profitability. Established Tokyo Electron Oregon, Inc. Created the Tokyo Electron Corporate Governance Guidelines. Restarted and announced a new logo and corporate philosophy. |
| 2016 |
Shipped 5,000 etching process chambers in Miyagi. Received the Prime Minister's Award. |
| 2017 |
Established Tokyo Electron Technology Solutions Co., Ltd. Selected for Forbes Japan's 'Best 100 Japanese Business Leaders'. |
| 2018 |
Selected for Thomson Reuters 'Top 100 Global Tech Leaders'. Established Tokyo Electron (Malaysia) Sdn. Bhd. |
| 2019 |
Partnered with BRIDG (U.S.). |
| 2020 |
Established TEL Manufacturing and Engineering of America, Inc. Former Chairman and President Tetsuro Higashi received the Order of the Rising Sun, Gold Rays with Neck Ribbon. |
| 2021 |
Ranked first domestically in the 2nd ROESG Ranking (2020 edition). Selected for TOPIX Core30. Launched the supply chain initiative 'E-COMPASS'. |
| 2022 |
Received the Corporate Governance of the Year® 2021 Grand Prize. Moved to the Tokyo Stock Exchange Prime Market. Ranked 'Most Honored Company' in IR rankings for seven consecutive years. Announced a new vision and corporate message 'Technology Enabling Life'. |
| 2023 |
Clarivate Top 100 Global Innovators for two consecutive years. Certified as a Health & Productivity Management Organization for five consecutive years. Ranked 1st in six categories in the Institutional Investor Best IR Firms ranking. Participated in UPWARDS. Developed ultra-high-speed memory channel hole etching technology. Established Tokyo Electron Philippines Semiconductor Support Inc. Continuously selected for indices. Celebrated its 60th anniversary on November 11. Contributed to the innovation of cutting-edge device technology. Selected for the DJSI Asia Pacific social responsibility investment index for eight consecutive years. Designed and envisioned the 60th anniversary logo. |
| 2024 |
Clarivate Top 100 Global Innovators for three consecutive years. Certified as a Health & Productivity Management Organization for six consecutive years. Selected as a top IR company by Institutional Investor for nine consecutive years. Continuously selected for indices. Awarded the Order of the Sacred Treasure, Gold Rays with Neck Ribbon. |
| 2025 |
Clarivate Top 100 Global Innovators for four consecutive years. Certified as a Health & Productivity Management Organization for nine consecutive years. Continuously selected for indices. Certified as PRIDE Index 2025 Gold for two consecutive years. Achieved platinum status in Tohoku business site RBA audit. |
